University of North Florida
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Stuart Chalk, Ph.D.
Department of Chemistry
University of North Florida
Phone: 1-904-620-1938
Fax: 1-904-620-3535
Website: @unf

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High purity

Citations 1

"Optimization Of ET-ICP-MS Conditions For The Determination Of Multi-elements In Semiconductor-grade Acids"
Fresenius J. Anal. Chem. 1996 Volume 356, Issue 1 Pages 31-36
L. Samuel Contact Information, Katsuhiro Nakagawa and Tetsuya Kimijima

Abstract: Sample solutions (1-50 µL) were placed in graphite cups held in a ring-shaped graphite holder. The ET heating cycles were optimized for the cations of Cr(III), Mn(II), Al(III) and Na(I) singly, with Ar (1.07 L/min) as carrier gas to the ICP-MS detector. The Ar plasma-gas flow rate was 0.5 l/min and the cooling gas flow rate was 15 L/min. Maximum intensity and minimum RSD were achieved at vaporization temperatures of 3000°C for Cr and Al, 2800°C for Mn and 2750°C for Na, with vaporization times of 6-15 s. Compromise conditions of 2950°C for 6 s were chosen for the simultaneous determination of all four metals. Calibration graphs (25 µL injections) were linear for 0.5-3 ng/ml of each. The method was applied to the analysis of concentrated HCl that had been used for cleaning silicon wafers. Recoveries of 1 and 2 ng/mL of the four metals added to HCl were 95.5-117.7%. The detection limits, calculated as the surface atom concentration x 10^10/cm2 ranged from 0.002-0.58 for the single-element conditions and 0.002-1.48 for the compromise multi-element conditions, which compared very favourably with the detection limits obtained by flow injection ICP-MS.
Chromium(III) Manganese(II) Aluminum(III) Sodium(I) Mass spectrometry Method comparison Optimization